WebChuck Flatness +/-13μm Chuck Breakdown Voltage At least 500V Chuck Isolation At least 1GΩ Chuck Adjustment 360° coarse, +/-6° fine Microscope High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X Feedthrough Terminals BNC, Triax or Banana plug System Dimensions 101cm wide x91cm deep x … WebMost vacuum chucks can be restored to the original or even tighter tolerance condition. Depending on size, flatness is possible to ¼ wave, parallelism to 50 millionths of an inch, thickness tolerance usually to 0.001" or tighter and …

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WebMay 17, 2005 · Wafer flatness is studied to investigate the cause of this defocus. The chuck shape is the key to avoid to defocusing at these two positions. Modification of chuck shape can reduce yield loss. Edge defocus can be reduced by several techniques on a Nikon S204 scanner. By using main software MCSV version 3.44 or above, as well as … WebApr 1, 2006 · Preliminary analysis indicates that a chuck flatness of about 50nm within the quality area of the mask can be realized with an optimized optics manufacturing technology. Yet, there are... ipd isc itr

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http://euvlsymposium.lbl.gov/pdf/2007/ET-08-Harned.pdf WebThe flatness of the chuck on the stepper or scanner is critical to obtain good patterning performance especially in the sub quarter micron regime. In this study an attempt has … WebWafer flatness is defined as the variation of wafer thickness relative to a reference plane. The flatness of the wafer can be described either by a global flatness value or as the … open v closed primaries